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Indium Tin Oxide {ITO} Target
Principal Uses
LCD transparent electricity conductive ITO film deposited by vacuum magnetic sputtering.
Physical Properties
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Chemical Formula
：
In
2
O
3
/SnO
2
Relative Density
：
>=99%
Crystal Particle Size
：
5~15µm
Electrical Resistivity
：
1.2×10
-4
Ω·cm
Linear Thermal Expansion
：
5.8×10
-6
K
-1
Purity
：
>=99.99%
Appearance
：
Black Ceramic Piece
Impurity (Unit: ppm)
：
Element
Al
Sb
Cd
Cu
Fe
Pb
Ni
Si
Zn
Ba
Content (<=)
5
5
5
10
10
10
10
15
5
5
Characterisation Methods
Crystal Particle Size
：
Observed by SEM
Purity
：
Tested by ICP—AES means
Density
：
Tested by Archimedes Means
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